| Measuring Range, X-Axis (Traverse) | 50 mm |
| Measuring Range, Z-Axis (Vertical) | ±500 µm |
| Sensor Resolution | 0.0016 µm at ±50 µm range; 0.016 µm at ±500 µm range |
| Drive Unit Straightness | 1 µm / 50 mm |
| Measurement Types | Roughness profile, waviness profile, primary profile, Abbott curve, motif |
| Parameter Standards | JIS-82, JIS-87, JIS-94, JIS-01, JIS-13, ISO-84, ISO-97, DIN-90, ASME-95 |
| Roughness Profile Parameters | Ra75, Rq, Rp, Rv, Rc, Rt, S, R3z, PPI, Ra, Rsk, Rku, Ry, Sm, RΔa, RΔq, Rz, Pc, Rλa, Rλq, lr, RSm, Rz94, RPc, RS, Rz.I, Rpm, HSC |
| Waviness Profile Parameters | WCA, WCC-q, WCC-p, WCC-v, WCC-m, WCC2Sm, WC-q, WC2p, WC-v, WCM, WC2Sm, WC-t, Wa, Wq, Wsk, Wku, Wp, Wv, Wz, Wc, Wt, WSm, WΔq, WPc |
| Primary Profile Parameters | Rsk, Rku, Rmax, Sm, Δa, Δq, Rz, λa, λq, lr, TILT A, AVH, Hmax, Hmin, AREA, Rz.J, Pa, Pq, Psk, Pku, Pp, Pv, Pc.I, Pt, PSm, PΔq, PPc, Pc |
| Abbott Curve Parameters | Rk, Rpk, Rvk, Mr1, Mr2, V0, K, A1, A2 |
| Motif Parameters | NCRX, AR, R, Rx, NR, CPM, SR, SAR, AW, W, Wx, Wte, NW, SW, SAW, Rke, Rpke, Rvke, Mr1, Mr2, V0, K |
| Evaluation Curves | Roughness profile, waviness profile, primary profile, Abbott curve, motif |
| Characteristic Curves | Abbott curve (Rmr(c), Rmr2(c), Rδc(c), tp(c), tp2(c), Htp(c)), amplitude frequency analysis curve, amplitude distribution curve |
| Form Removal | Global, first half, second half, center, two points, curve |
| Filter Types | Gaussian, FFT, PC, DP, 2RC |
| Filter Cutoff λs | 0, 2.5, 8, 25 μm |
| Filter Cutoff λc | 0.08, 0.25, 0.8, 2.5, 8 mm |
| Filter Cutoff λf | 0.8, 2.5, 8, 25 mm |
| Evaluation Length | Sampling length × number of samples (standard and custom sampling length modes) |
| Measuring Speed | 0.05, 0.10, 0.50, 1.00, 2.00 mm/s |
| Return Speed | 0.05, 0.10, 0.50, 1.00, 2.00 mm/s |
| Sensor Type | Standard universal type |
| Sensor Principle | Differential inductance |
| Sensor Range | ±500 μm |
| Stylus | 5 μm tip radius diamond, 90° included angle |
| Measuring Force | Adjustable, 0.4 mN to 0.75 mN |
| Display | 5-inch color IPS touchscreen |
| Data Output | TF card, USB flash drive, Wi-Fi printing |
| Interface Languages | Multilingual, English standard |
| Voltage | AC 220 V ±10%, built-in rechargeable battery (AC adapter charging), 3-hour charge time (110V is also available) |
| Power Consumption | Approx. 30 VA |
| Drive Unit Dimensions | 80 (W) × 392 (L) × 180 (H) mm |
| Control Unit Dimensions | 245 (W) × 162 (L) × 68 (H) mm |